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Physics of Radio-Frequency Plasmas

$125.00 (P)

  • Date Published: April 2011
  • availability: Available
  • format: Hardback
  • isbn: 9780521763004

$ 125.00 (P)

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About the Authors
  • Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.

    • Features over 100 in-text questions to help readers develop insights into the physics of RF plasmas
    • Worked examples apply the theories covered to a wide range of technical situations
    • Links the three main forms of RF plasma source to give a coherent account
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    Reviews & endorsements

    "Chabert and Braithwaite have produced an excellent guide to the diversity of RF powered plasmas, as used for many technological processes. The value of combining experiment and theory is well demonstrated. They have given explanations of plasma behavior that will suffice for many readers’ purposes but that also provide a clear introduction to more difficult plasma conditions as the subject develops further complexities."
    John I.B. Wilson in Contemporary Physics

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    Product details

    • Date Published: April 2011
    • format: Hardback
    • isbn: 9780521763004
    • length: 394 pages
    • dimensions: 244 x 175 x 30 mm
    • weight: 0.82kg
    • contains: 156 b/w illus. 144 exercises
    • availability: Available
  • Table of Contents

    1. Introduction
    2. Plasma dynamics and equilibrium
    3. Bounded plasmas
    4. Radiofrequency sheaths
    5. Single frequency capacitively-coupled plasmas
    6. Multi-frequency capacitively-coupled plasmas
    7. Inductively-coupled plasmas
    8. Helicon plasmas
    9. Real plasmas
    10. Electrical measurements

  • Authors

    Pascal Chabert, Ecole Polytechnique, Paris
    Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

    Nicholas Braithwaite, The Open University, Milton Keynes
    Nicholas Braithwaite is Professor of Engineering Physics at The Open University, where his research group work on the physics of 'technological' plasmas. He has been on the editorial board of the journal Plasma Sources Science and Technology since 1998.

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