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Atomic and Ion Collisions in Solids and at Surfaces
Theory, Simulation and Applications

$35.00 USD

Roger Smith, Mario Jakas, Dave Ashworth, Bob Oven, Mark Bowyer, Ivan Chakarov, Roger Webb
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  • Date Published: February 2011
  • availability: This ISBN is for an eBook version which is distributed on our behalf by a third party.
  • format: Adobe eBook Reader
  • isbn: 9780511882678

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About the Authors
  • This 1997 book is an introduction to the application of computer simulation and theory in the study of the interaction of energetic particles (< 1 eV to the MeV range) with solid surfaces. The authors describe methods which are applicable both to hard collisions between nuclear cores of atoms down to soft interactions, where chemical effects or long-range forces dominate. In surface science, potential applications include surface atomic structure determination using ion scattering spectroscopy or element analysis using SIMS or other techniques that involve depth profiling. Industrial applications include optical or hard coating deposition, ion implantation in semiconductor device manufacture or nanotechnology. Plasma-sidewall interaction in fusion devices may also be studied using the techniques described. This book will be of interest to graduate students and researchers, both academic and industrial, in surface science, semiconductor engineering, thin-film deposition and particle-surface interactions, in departments of physics, chemistry and electrical engineering.

    • Simulation is increasingly important in this field
    • First book to cover all the up-to-date modelling techniques
    • Requires no substantial knowledge in either mathematics or condensed matter physics
    • Technique has range of industrial applications in thin-film deposition, semiconductor device manufacture and nanotechnology
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    Reviews & endorsements

    '… a valuable resource for researchers in academia and industry.' Acta Crystallographica

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    Product details

    • Date Published: February 2011
    • format: Adobe eBook Reader
    • isbn: 9780511882678
    • contains: 123 b/w illus. 26 tables
    • availability: This ISBN is for an eBook version which is distributed on our behalf by a third party.
  • Table of Contents

    1. Introduction
    2. The binary collision
    3. Interatomic potentials
    4. Electronic energy loss models
    5. Transport models
    6. The rest distribution of primary ions in amorphous targets
    7. Binary collision algorithms
    8. Molecular dynamics
    9. Surface topography.

  • Editor

    Roger Smith, Loughborough University


    Roger Smith, Mario Jakas, Dave Ashworth, Bob Oven, Mark Bowyer, Ivan Chakarov, Roger Webb

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