Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing
Part of MRS Proceedings
- C. Robert Helms, Stanford University, California
- Masataka Hirose, Hiroshima University, Japan
- Robert J. Nemanich, North Carolina State University
- Gary W. Rubloff, IBM T J Watson Research Center, New York
- Date Published: November 1992
- availability: Temporarily unavailable - available from TBC
- format: Hardback
- isbn: 9781558991545
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