A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.Read more
- Covers state-of-the-art inertial MEMS and their properties
- Discusses problems involved in MEMS manufacture and the pros and cons of various solutions, helping engineers to find the best solution quickly and to avoid pitfalls
- Coverage of design basics and engineering models for representative system components helps cut design time
Not yet reviewed
Be the first to review
Review was not posted due to profanity×
- Date Published: February 2011
- format: Hardback
- isbn: 9780521766586
- length: 492 pages
- dimensions: 254 x 180 x 26 mm
- weight: 1.09kg
- contains: 218 b/w illus. 8 colour illus. 7 tables
- availability: Available
Table of Contents
3. Non-inertial forces
4. MEMS - technologies
5. First level packaging
6. Electrical interfaces
9. Test and calibration
10. Concluding remarks
Find resources associated with this titleYour search for '' returned .
Type Name Unlocked * Format Size
This title is supported by one or more locked resources. Access to locked resources is granted exclusively by Cambridge University Press to lecturers whose faculty status has been verified. To gain access to locked resources, lecturers should sign in to or register for a Cambridge user account.
Please use locked resources responsibly and exercise your professional discretion when choosing how you share these materials with your students. Other lecturers may wish to use locked resources for assessment purposes and their usefulness is undermined when the source files (for example, solution manuals or test banks) are shared online or via social networks.
Supplementary resources are subject to copyright. Lecturers are permitted to view, print or download these resources for use in their teaching, but may not change them or use them for commercial gain.
If you are having problems accessing these resources please contact email@example.com.
Sorry, this resource is locked